dynamic system for heating or cooling substrates varying linearly transported

摘要

dynamic for heating or variable cooling of substrates transported linearly system. # a system (100) for heating or cooling substrates (108) discrete, transported linearly, with a gap (114) between a trailing edge (112) is provided a first substrate and a leading edge (110) of a subsequent substrate in a transport direction. The system includes a camera (102) and a conveyor (132) operably configured within the chamber for moving substrates through it at a speed of transport. A plurality of units of temperature control (116) individually controlled, for example, heating or cooling units, are linearly arranged within the chamber along the conveying direction. A controller (118) is in communication with each of the control units of temperature (116) for circulating sequentially output unit from an output of steady state temperature along the conveying direction as a function of the position of the leading and trailing edges of the substrates within said chamber relative to said control units with temperature to reduce temperature variations induced by the edges on the substrates.