Multiplier device of electron micromechanized and for detection of ionizing particles, system of detection of ionizing particles and method of manufacture of the device (Machine-translation by Google Translate, not legally binding)

摘要

Micromechanized electron multiplier device for ionizing particle detection, ionizing particle detection system and device manufacturing method. Micromechanized and stackable electron multiplier (1) device for the detection of ionizing particles comprising a solid substrate with a micromachined central cavity (14) in the center of the underside of the substrate defining a perimeter support contour of the substrate (12) around of the cavity and a plurality of micro-machined through-holes (13) located in correspondence with the cavity (14); a first insulating dielectric layer (17) deposited on all surfaces of the solid substrate; a first metallic polarization electrode (15) located on the upper face of the first electrical insulating layer (17); and a second metallic polarization electrode (16) located on the lower face of the first electrical insulating layer (17). (Machine-translation by Google Translate, not legally binding)