MICROELECTRONIC DEVICE FORMED FROM A SET OF ELECTRONIC MICROSYSTEMS COMPRISING AT LEAST THREE NON-ENCAPSULATED MONOLITHIC INERTIAL TRANSDUCERS SENSITIVE ALONG AT LEAST ONE AXIS

摘要

A microelectronic device formed from a set of electronic microsystems comprising at least three non-encapsulated monolithic inertial transducers (31, 32, 33) sensitive along at least one axis, and the associated electronics of same, said set being encapsulated in a casing. The casing comprises a volume (6) hollowed into a base (2), the transducers (31, 32, 33) being positioned in this hollow volume in an arrangement in which the three sensitive axes form a three-dimensional reference system, each of the transducers (31, 32, 33) being in contact with an inner wall of the hollow volume (6), a cover (1) rigidly connected to said base (2) ensuring the sealed closure of the casing.