HYDROGEN GAS SENSOR WITH CONCENTRATION FUNCTION AND HYDROGEN GAS SENSOR PROBE USED IN SAME

摘要

[Problem] To provide a hydrogen gas sensor which is compact, can be mass-produced, is low cost, highly selective for hydrogen gas, highly sensitive and very accurate. [Solution] A hydrogen gas sensor element (500) and a hydrogen gas concentration part (300) which has, on a membrane (10) thermally isolated from a substrate (1), a heater (25), a temperature sensor (20) and a hydrogen gas absorbing substance (5) are provided in the same microchamber (100). Hydrogen gas is released from the concentration part (300) and highly concentrated due to heat applied by the heater, and the highly concentrated hydrogen gas is measured by the hydrogen gas sensor element (500). Because the hydrogen gas absorbing substance (5) exhibits selectivity for hydrogen gas, there is no need for the hydrogen gas sensor element (500) to exhibit selectivity for hydrogen gas. An airflow limiting part (250) is provided in the exit/entrance opening of the microchamber (100), whereby dilution of hydrogen gas by the entrance of external airflow is prevented. Introduction of the gas to be investigated into the microchamber (100) is performed at predetermined intervals using an introduction means (150) such as a pump.