首页> 外国专利> DISTANCE MEASUREMENT DEVICE, SHAPE MEASUREMENT DEVICE, PROCESSING SYSTEM, DISTANCE MEASUREMENT METHOD, SHAPE MEASUREMENT METHOD, AND PROCESSING METHOD

DISTANCE MEASUREMENT DEVICE, SHAPE MEASUREMENT DEVICE, PROCESSING SYSTEM, DISTANCE MEASUREMENT METHOD, SHAPE MEASUREMENT METHOD, AND PROCESSING METHOD

机译:距离测量装置,形状测量装置,处理系统,距离测量方法,形状测量方法和处理方法

摘要

The present invention enhances the measurement accuracy of a distance measurement device (method) that uses a laser. A distance measurement method provided with a first step for irradiating multiwavelength laser light; a second step for splitting the multiwavelength laser light; a third step for carrying out photoelectric conversion for each wavelength of measurement light that has been obtained by irradiating, onto a subject, a first beam having undergone the splitting and for detecting the converted measurement light as a measurement signal; a fourth step for carrying out photoelectric conversion for each wavelength of a second beam that has undergone the splitting and is different from the first beam and for detecting the converted beam as a reference signal; and a fifth step for detecting the relative phase between the measurement signal and the reference signal and determining the distance of a measurement light path on the basis of the detected relative phase.
机译:本发明提高了使用激光的距离测量装置(方法)的测量精度。提供一种用于照射多波长激光的第一步的测距方法;第二步,分离多波长激光;第三步骤,对通过将被分束的第一光束照射到被检体上而获得的测量光的每个波长进行光电转换,并且将转换后的测量光检测为测量信号;第四步骤,对经过分束后与第一光束不同的第二光束的每个波长进行光电转换,并将转换后的光束检测为参考信号;第五步骤,用于检测测量信号和参考信号之间的相对相位,并基于检测到的相对相位确定测量光路的距离。

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