HIGH-SENSITIVITY TERAHERTZ MICROFLUIDIC CHANNEL SENSOR AND MANUFACTURING METHOD THEREOF

摘要

A high-sensitivity terahertz microfluidic channel sensor and manufacturing method thereof; the sensor comprises a substrate (1) and a cover layer (5) respectively provided with a metal plane reflector (2) and a metal microstructural layer (4); a microfluidic channel (6) is formed between the metal plane reflector (2) and the metal microstructural layer (4); and when the microfluidic channel (6) has liquid to be tested therein, a composite structure formed by the metal microstructural layer (4), the liquid to be tested, and the metal plane reflector (2) has good absorbency, in terahertz waveband, caused by resonance. The method comprises: machining to form the metal plane reflector (2) and the metal microstructural layer (4) respectively on the substrate (1) and the cover layer (5); fixedly connecting the substrate (1) to the cover layer (5), and forming a closed microfluidic channel (6) between the substrate (1) and the cover layer (5); and providing through holes (7, 8, 9, 10) on the substrate (1) and/or the cover layer (5) communicating with the microfluidic channel (6) to form a liquid flow channel for inputting/outputting the liquid to be tested into/from the sensor. The sensor has a simple structure, is easy to machine and use, and improves detection sensitivity compared with existing sensors.