SAMPLE MEASUREMENT RESULT PROCESSING DEVICE, SAMPLE MEASUREMENT RESULT PROCESSING METHOD, AND PROGRAM

摘要

The purpose of the present invention is to provide a device that makes it possible to ascertain the correlation between the state of contamination of a surface of a sample and the electrical characteristics of the sample. The sample measurement result processing device (100) according to the present invention is provided with a first acquisition unit (101) for dividing a surface of a sample into a plurality of measurement positions and acquiring first measurement results for each measurement position in which measurement data for the sample measured using total reflection X-ray fluorescence spectroscopy is associated with the measurement positions, a second acquisition unit (102) for dividing the surface of the sample into a plurality of measurement positions and acquiring second measurement results for each measurement position in which measurement data for the sample measured using thermally stimulated current spectroscopy is associated with the measurement positions, and an integration unit (104) for associating and integrating the acquired first measurement results and the second measurement results using the measurement positions included in the first measurement results and the second measurement results. An example of a sample is a semiconductor wafer.