SPIN DETECTOR, CHARGED PARTICLE BEAM DEVICE AND PHOTOEMISSION SPECTROSCOPIC DEVICE

摘要

This spin detector is equipped with a plurality of VLEED detectors (104) disposed in the vicinity of an optical axis of electrons (101) to be measured. The VLEED detectors each have a voltage applied thereto which becomes sequentially lower in the direction of travel of the electrons to be measured. As the electrons to be measured pass through the rows of VLEED detectors, the energy thereof decreases, causing the electrons to be taken into the VLEED detectors sequentially. This allows a VLEED detector, a spin detector with a narrow energy acceptance, to be used for highly efficient detection of a spin polarization possessed by secondary electrons with an energy dispersion of, for instance, on the order of 0 to 20 V.