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HIGH SENSITIVITY PLASMONIC STRUCTURES FOR USE IN SURFACE PLASMON RESONANCE SENSORS AND METHOD OF FABRICATION THEREOF
HIGH SENSITIVITY PLASMONIC STRUCTURES FOR USE IN SURFACE PLASMON RESONANCE SENSORS AND METHOD OF FABRICATION THEREOF
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机译:用于表面等离子共振传感器的高灵敏度等离子结构及其制造方法
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摘要
There is disclosed a method for fabricating a plasmonic structure for use in a surface plasmon resonance sensor, comprising: coating a surface of an optically clear substrate with a monolayer of microspheres forming a sphere mask; etching the sphere mask to produce an array of microholes; depositing an adsorption layer on the etched sphere mask and the surface of the optically clear substrate; depositing a metallic film on the adsorption layer; and removing the sphere mask. This is also disclosed a plasmonic structure for use in a surface plasmon resonance sensor, comprising: an adsorption layer; and a metallic film deposited on the adsorption layer; wherein the adsorption layer and the metallic film comprises an array of microholes.
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