METHOD FOR MANUFACTURING SOLID STATE ELEMENTS BY A LASER TREATMENT AND TEMPERATURE-INDUCED STRESSES

摘要

The invention relates to a method for manufacturing solid state elements (40), in particular substrate elements for receiving electroconductive components. The method comprises at least the following steps: providing a solid state element (2) from which at least one solid state layer (4) is to be separated, generating a first group of defects by means of a laser (18), in order to create a first detachment plane (8), along which the solid state layer (4) is separated from the solid state element (2), generating a second group of defects by means of the laser (18) in order to create at least one second detachment plane (50), the first detachment plane (8) and the second detachment plane (8) being orthogonal to each other, detaching the solid state layer (4) from the solid state element (2) along the first detachment plane (8), as a result of the generation of stresses in the solid state element (2), and separating the solid state layer (4) along the second detachment plane (50) into the individual solid state elements (40).