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METHOD AND DEVICE FOR FORMING PRECISION HOLES IN OPTICALLY TRANSPARENT FILM USING AN ULTRASHORT PULSE OF LASER RADIATION
METHOD AND DEVICE FOR FORMING PRECISION HOLES IN OPTICALLY TRANSPARENT FILM USING AN ULTRASHORT PULSE OF LASER RADIATION
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机译:利用超短脉冲激光在光学透明胶片中形成精密孔的方法和装置
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摘要
Proposed is a device for forming precision holes in optically transparent film using an ultrashort pulse of laser radiation, in which the laser radiation is focused by a lens with a high numerical aperture through a volume of a medium with a refractive index that is greater than 1.5. The device makes it possible to form a hole with a diameter of up to 5 μm in a film having a thickness of up to 100 μm using a single ultrashort pulse of laser radiation.
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