CLASSIFICATION DEVICE, CLASSIFICATION METHOD, CLASSIFICATION PROGRAM, TRANSFER DEVICE, TRANSFER METHOD, AND TRANSFER PROGRAM

摘要

Accurate coordinate data is obtained for individual chips within a wafer after expansion, allowing accurate pick-up even if said expansion causes chips to shift or drop out. This invention has the following: an imaging unit (60a) that images chips (S) on an expanded wafer sheet (Da); a reference detection unit (12) that uses the captured image data to find a reference chip and identifies the coordinates of said reference chip, yielding coordinate data; a scanning unit (13) that identifies the coordinates of each chip (S), yielding coordinate data, on the basis of image data captured for each chip (S) as the imaging unit (60a) moves relative to the wafer sheet (Da), based on the coordinate data for the reference chip and relative-position information for each chip (S); and a pick-up unit (50a) that selectively picks up chips (S) while moving relative to the wafer sheet (Da) on the basis of the coordinate data for each chip.