首页> 外国专利> NANOPOSITIONING SUBSTRATE PREPARATION APPARATUS AND PREPARATION METHOD USING DIP PEN NANOLITHOGRAPHY WITH SINGLE OR MULTIPLE TIPS USING ATOMIC FORCE MICROSCOPE (AFM)

NANOPOSITIONING SUBSTRATE PREPARATION APPARATUS AND PREPARATION METHOD USING DIP PEN NANOLITHOGRAPHY WITH SINGLE OR MULTIPLE TIPS USING ATOMIC FORCE MICROSCOPE (AFM)

机译:使用原子力显微镜(AFM)的单笔或多笔DIP笔纳米照相术对基体制备设备和制备方法进行纳米定位

摘要

The present invention relates to dip pen nanolithography technique which is an imaging method using a atomic force microscope, and more specifically, to a preparation apparatus and a preparation method for a nanopositioning substrate of an ink system using dip pen nanolithography with a single or multiple tips. According to the present invention, with respect to the imaging method using the atomic force microscope, provided is the preparation apparatus and the preparation method for the nanopositioning substrate of the ink system using dip pen nanolithography, with single or multiple tips, comprising: a first ink storage portion and a second ink storage portion for coating a tip with an ink; a first washing portion and a second washing portion for washing the tip coated with an ink; a pattern carving portion for carving a tip on a substrate; an electrode connection portion for applying voltage; and a position checking portion for checking or determining the position of the coated tip on a micrometer-scale area, wherein the position checking portion is formed to check position through the change of a voltage-current, the extent of bending of an AFM tip with respect to voltage and an AFM image; and it is possible to increase the density of a biomaterial on the micrometer-scale area by integrating a large number of the biomaterial on the substrate by using the reproducibility of the atomic force microscope tip position.
机译:浸墨笔纳米光刻技术技术领域本发明涉及一种浸墨笔纳米光刻技术,其是使用原子力显微镜的成像方法,更具体地,涉及一种使用具有单个或多个尖端的浸墨笔纳米光刻技术的墨水系统的纳米定位基板的制备设备和制备方法。 。根据本发明,关于使用原子力显微镜的成像方法,提供了一种使用浸笔纳米光刻技术的具有单个或多个尖端的墨水系统的纳米定位基板的制备设备和制备方法,包括:第一墨水存储部分和第二墨水存储部分,用于用墨水涂覆尖端。第一清洗部分和第二清洗部分,用于清洗涂有墨水的笔尖;图案雕刻部,用于在基板上雕刻尖端。用于施加电压的电极连接部分;位置检查部分,其用于检查或确定涂覆的尖端在微米尺度区域上的位置,其中,该位置检查部分形成为通过电压电流的变化,AFM尖端的弯曲程度和关于电压和AFM图像;并且通过利用原子力显微镜尖端位置的可再现性,通过将大量生物材料整合在基板上,可以增加微米级区域上生物材料的密度。

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