首页> 外国专利> PROCESS OF TEXTURING SILICON SURFACE FOR OPTIMAL SUNLIGHT CAPTURE IN SOLAR CELLS

PROCESS OF TEXTURING SILICON SURFACE FOR OPTIMAL SUNLIGHT CAPTURE IN SOLAR CELLS

机译:太阳能电池的最佳阳光捕获的织构硅表面的过程

摘要

A process of treating a silicon substrate surface for optimizing sunlight capture in the fabrication of solar cells is disclosed. Each of the two sides of the silicon substrate is textured with a laser source to roughen its surface by fabricating nanoscale structures thereon. Surface texturing may be conducted on both sides of a crystalline silicon wafer by flipping over to repeat our process on the other side such that sunhght reflectivity is minimized and photon trapping is maximized. The process may be conducted in room temperature and vacuum in a dry-etch processing environment. The substrate may undergo translation in the X- Y axes for control of the substrate's movement to achieve the requisite texturing by the laser beam of a pulse laser of Nd-YAG source in 533 nm and 1024 nm wavelengths at 75 joules/pulse with translation speed of 0.5 mm/second. Our process is suitable for solar cells that includes heteroj unction structures, specifically, with intrinsic thin layer (HIT) structure and particularly on crystalline silicon (c-Si) (p-type) substrate which may include exposure to nano-second to femto-second range pulsed laser on dry thin film solar cell wafer.
机译:公开了一种处理硅衬底表面以在太阳能电池的制造中优化阳光捕获的方法。硅衬底的两侧的每一个都用激光源进行纹理处理,以通过在其上制造纳米级结构来使其表面粗糙化。可以通过在另一侧重复翻转过程在结晶硅晶片的两面上进行表面纹理化处理,以使阳光反射率最小化,光子捕获最大化。该过程可以在室温和真空中在干蚀刻处理环境中进行。基板可以在X-Y轴上进行平移,以控制基板的移动,以通过Nd-YAG源的533 nm和1024 nm波长的Nd-YAG脉冲激光的激光束在大于75焦耳/脉冲的条件下平移速度<0.5毫米/秒。我们的工艺适用于包括异质结结构(特别是具有本征薄层(HIT)结构)的太阳能电池,特别是在晶体硅(c-Si)(p型)衬底上,包括暴露于纳秒级至飞秒级的太阳能电池。在干薄膜太阳能电池晶片上的第二范围脉冲激光。

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