SAMPLE SUPPORTING MEMBER FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE AND METHOD FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE

摘要

PROBLEM TO BE SOLVED: To provide a technique for observing an organic material sample or a biological sample, susceptible to damage by electron beam irradiation, with high resolution without requiring surface coating or dyeing.;SOLUTION: A potential gradient is generated between an insulating thin film 11 and a conductive thin film 12 at a part where an electron beam is incident, by injecting electrons into a sample support member. Potential barrier on the surface of the insulating thin film 11 becomes thin, and electron emission phenomenon (field emission phenomenon) occurs due to tunnel effect. Secondary electrons generated in the insulating thin film 11 are tunneled to the conductive thin film 12 side along the potential gradient. The secondary electrons thus tunneled are diffused in the conductive thin film 12 and arrive at the sample 30. When the sample 30 is a biological sample having a high electron transmittance, the secondary electrons 42 are also tunneled through the sample 30 and detected by a secondary electron detector 50 thus providing an SEM image reflecting the internal structure of the sample 30.;COPYRIGHT: (C)2013,JPO&INPIT