MINIATURIZED DEVICE FOR MEASUREMENTS OF VERY LOW PRESSURE AND OF GAS CONCENTRATIONS

摘要

A miniaturized device for measurements of very low level pressure 1 is described. The device 1 comprises an ionization-based detection member 11, configured to detect a pressure value Pi, electronic processing means 10, operatively connected to the ionization-based detection member 11, and configured to generate a measured pressure value P based on the detected pressure value Pi, and further comprising interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output the measured pressure value P. The ionization-based detection member 11, the electronic processor 10 and the interface means 15 are comprised in a single integrated device. The ionization-based detection member 1 1 comprises an ionization source 21 and an ionization region 20, containing gas particles the pressure of which has to be measured, arranged so as to be passed through by ionization particles (e.g., electrons) generated by the source 21, so that the ionization electrons ionize the gas particles, thus generating respective ions. The ionization-based detection member 11 further comprises ion extraction means 22, configured to determine a preferential trajectory for the generated ions, passing through at least one ion extracting window 31, through which the ions leave the ionization region 20; and at least one ion detector 23, configured to detect ions and generate an electrical variable depending on the amount of ions detected and representative of the pressure value of the gas particles that are present in the ionization region 20. The at least one ion detector 23 having micrometer dimensions and is arranged at a respective ion extraction window 31, so as to be shielded against trajectories of X rays generated by impacts of the ionizing electrons with parts of the ionization region 20 other than the at least one ion detector (23).