MONOLITHIC SEPARATION MEMBRANE STRUCTURE, METHOD FOR PRODUCING MONOLITHIC SEPARATION MEMBRANE STRUCTURE, AND METHOD FOR DEHYDRATING SAME

摘要

A monolithic separation membrane structure (100) equipped with a support body (211) and a separation membrane (300). The support body (211) comprises a porous material and has a plurality of through-holes (TH1) formed therein. The separation membrane (300) is cylindrically formed along the inside of the plurality of first through-holes (TH1), and involves the use of a penetrative vaporization method or a vapor permeation method. The helium-gas permeation resistance of the support body (211) is less than 8.3×10⁷ Pa·sec/m².