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Measuring device and measuring method for measuring an indicator by means of a bend analysis
Measuring device and measuring method for measuring an indicator by means of a bend analysis
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机译:用于通过弯曲分析来测量指示器的测量装置和测量方法
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摘要
The invention relates to a measuring device for measuring a measured variable by means of a diffraction measurement, comprising a radiation source (1) which emits radiation, an object (7-9) which is arranged in the beam path of the radiation source (1), and a radiation detector (5), which is arranged in the beam path of the radiation source (1) behind the object (7-9) and measures a diffraction pattern of the object (7-9), in particular a Fresnel diffraction image. It is proposed that the measurand to be measured is a property of an environment of the subject (7-9), the measurand influencing an environment-dependent feature quantity of the subject (7-9), so that the loop-dependent feature quantity of the subject (7-9) Measure reproduces while the environment-dependent property size of the object (7-9) affects the diffraction pattern, so that the measured diffraction image of the subject (7-9) reflects the environment-dependent property size and thus the measured variable.
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