R1, R2, R3, R4, R5 are organic ligands being independently selected in H, C1-C4 alkyl group linear or branched, aryl group, silyl group, alkylamine group, alkylsylilamine group.M is tantalum."/>
公开/公告号EP2902396A1
专利类型
公开/公告日2015-08-05
原文格式PDF
申请/专利号EP20140305118
申请日2014-01-30
分类号C07F9/00;C23C16/455;H01L21/285;
国家 EP
入库时间 2022-08-21 15:02:17