MANUFACTURING METHOD OF VO_2 COATED SUBSTRATE

摘要

The present invention relates to a kind of methods that manufacture vanadium dioxide applies cloth base material, and the manufacturing method of cloth base material is applied more particularly, to a kind of vanadium dioxide, and wherein sun light transmission rate is according to the control temperature. The present invention provides the manufacturing methods that a kind of vanadium dioxide applies cloth base material, which is characterized in that including on vanadium metal or vanadium oxide film coating process vanadium metal or vanadium oxide substrate; Pass through rapid thermal annealing (RTA) with the vanadium metal or vanadium oxide and vanadium dioxide of rapid thermal anneal step change phase. ;The 2015 of copyright KIPO submissions