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CONCAVE PORTION FORMING METHOD, CONCAVE-CONVEX PRODUCT MANUFACTURING METHOD, LIGHT-EMITTING ELEMENT MANUFACTURING METHOD, AND OPTICAL ELEMENT MANUFACTURING METHOD
CONCAVE PORTION FORMING METHOD, CONCAVE-CONVEX PRODUCT MANUFACTURING METHOD, LIGHT-EMITTING ELEMENT MANUFACTURING METHOD, AND OPTICAL ELEMENT MANUFACTURING METHOD
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机译:凹部形成方法,凹凸产品制造方法,发光元件制造方法和光学元件制造方法
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摘要
recess forming method for forming a plurality of recessed to a The recording material layer changes the shape of the heat mode as possible , and a concave portion forming step of forming a concave portion by irradiating a light from a light-converging optical system including the light source is configured in the recording material layer, in or after formation of the concave portion formed in the recording material layer to check that the recess inspection light irradiation step of irradiating the light, the concave and the detection step of detecting a test amount of light that is reflected or diffracted from the unit, the output adjusting step of adjusting the output of the light source so that the light amount is a predetermined value on the basis of the amount of light (S1 ~ S4) provides a method comprising the. Further, the manufacturing method of the concave-convex products using this method, there is provided a method of manufacturing the optical element and manufacturing method of the light emitting element. ;
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