AN ASSEMBLY FOR MODIFYING PROPERTIES OF A PLURALITY OF RADIATION BEAMS, A LITHOGRAPHY APPARATUS, A METHOD OF MODIFYING PROPERTIES OF A PLURALITY OF RADIATION BEAMS AND A DEVICE MANUFACTURING METHOD

摘要

plurality of properties of the radiation beam assembly is initiated and the change of the assembly a plurality of waveguides adapted to guide becomes closer to the plurality of the radiation beam , and receiving the plurality of the radiation beam which is guided by a plurality of waveguides , and to generate a plurality of radiation beams corresponding to an integral multiple having a higher frequency and a configuration in which the frequency multiplication device . In addition , the corresponding lithographic apparatus , a method for changing the characteristics of the plurality of the radiation beam , and a device manufacturing method is described .