NON-DESTRUCTIVE INSPECTION SYSTEM FOR DISPLAY PANEL AND METHOD, AND NON-DESTRUCTIVE INSPECTION APPARATUS THEREFOR

摘要

The present invention relates to a non-destructive inspection system for a display panel and a method, and a non-destructive inspection apparatus thereof. The invention includes a light coupler to divide light created by light source and transmit it to a standard part and a sample part, and create interrupted interference light by combining incident light reflected from the standard part and the sample part and deliver it to a detection part; a standard part to phase-scan incident light from the light coupler in high speed and reflect it; a sample part to irradiate incident light from the light coupler to an image display panel, an inspection object and scan and reflect the light reflected from the image display panel; a detection part to get the image signal of the image display panel from the interference light entered from the light coupler; a control part to create the image of the image display panel based on the image signal of the image display panel delivered from the detection part, sense foreign materials and control the movement of the delivery part.;COPYRIGHT KIPO 2015