SAMPLE HOLDER DEVICE HAVING TEMPERATURE CONTROL FUNCTION AND SAMPLE THERMAL TREATMENT AND SURFACE ANALYSIS APPARATUS USING SAME

摘要

Disclosed are a sample holder device having a temperature control function and a sample thermal treatment and surface analysis apparatus using the same. According to an embodiment of the present invention, provided is a sample holder device having a temperature control function, which fixates a sample and transfers the sample to a space between a thermal treatment chamber and a surface analysis chamber and comprises: a first holder body to move along a sample transfer path between the thermal treatment chamber and the surface analysis chamber; a second holder body fixated to the top of the first holder body and having a sample fixating groove to allow the sample to be inserted and fixated; and one or more thermocouples on one side of the sample fixated to the sample fixating groove.;COPYRIGHT KIPO 2015