ELECTRODE STRUCTURE FOR CAPACITIVE BIOSENSOR HAVING INTERDIGITATED ELECTRODE, METHOD FOR MANUFACTURING THE ELECTRODE STRUCTURE, AND CAPACITIVE BIOSENSOR HAVING THE ELECTRODE STRUCTURE

摘要

Provided are an electrode structure for a capacitive biosensor having an interdigitated electrode, a method for manufacturing the same, and a capacitive biosensor having the same. According to the present invention, the method for manufacturing an electrode structure having an interdigitated electrode comprises: a step of forming an interdigitated electrode on a substrate; a step of depositing a thin film for forming a nano-island on the substrate from which a photomask has been removed; and a step of forming a plurality of nano-islands from the thin film for forming a nano-island by thermally treating the substrate on which the thin film for forming a nano-island is deposited.