METHOD FOR MODIFYING SURFACE OF METAL SILISIDE, METHOD FOR PRODUCING TRICHLOROSILANE USING SURFACE MODIFIED METAL SILISIDE AND APPARATUS FOR PRODUCING THE SAME

摘要

The present invention relates to a method for modifying the surface on metal silicide, a manufacturing method using the modified surface of the metal silicide and a manufacturing apparatus thereof wherein the method for modifying the surface on metal silicide includes the steps of supplying metal silicide catalyst whose surface is modified and metal silicon to a reactive part; supplying silicon tetra chloride and hydrogen gas to the reactive part; and supplying products generated by making the silicon tetra chloride react with the hydrogen gas from the metal silicon in the reactive part to a separation part and extracting trichlorosilane from the same.