METHOD FOR MODIFYING SURFACE OF METAL SILISIDE METHOD FOR PRODUCING TRICHLOROSILANE USING SURFACE MODIFIED METAL SILISIDE AND APPARATUS FOR PRODUCING THE SAME

摘要

The present invention relates to a metal silicide surface modification method, a method of manufacturing a trichlorosilane using the surface-modified metal silicide, and an apparatus for producing the metal tricalcium silicate, Supplying silane and hydrogen gas to the separator and separating the trichlorosilane component by supplying the product produced through the reaction of the hydrogen tetrachloride and the silicon tetrachloride supplied on the metallic silicon in the reaction section to the separator do.