ACOUSTIC RESONATOR COMPRISING ALUMINUM SCANDIUM NITRIDE AND TEMPERATURE COMPENSATION FEATURE

摘要

An acoustic resonator structure comprises a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride; a second electrode disposed on the piezoelectric layer; and a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode.