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TRANSFER UNIT, METHOD FOR CONTROLLING THE UNIT, AND APPARATUS AND METHOD FOR TRATING SUBSTRATE WITH USING THE UNIT
TRANSFER UNIT, METHOD FOR CONTROLLING THE UNIT, AND APPARATUS AND METHOD FOR TRATING SUBSTRATE WITH USING THE UNIT
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机译：转移单元，控制单元的方法以及使用该单元处理基质的装置和方法
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摘要
A transfer unit is disclosed. The transfer unit comprises: a robot for transferring substrates; and a controller for controlling the speed of the robot according to the number of the substrates to be transferred by the robot within set hours. When the number of the substrates to be transferred within the set hours is increased, the controller makes the moving speed of the robot fast.
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