首页> 外国专利> MEMS MICROPHONE HAVING PIEZO MEMBRANE

MEMS MICROPHONE HAVING PIEZO MEMBRANE

机译:具有压电膜的MEMS麦克风

摘要

Provided is an MEMS microphone having a piezo diaphragm. The MEMS microphone having the piezo diaphragm comprises a cover combined to a substrate to form an internal space; a transducer combined to an upper part of the substrate, disposed in the internal space, and converting an external sound, which comes in through a sound passing hole, into an electrical signal; and a semiconductor chip combined to the upper part of the substrate, electrically connected to the transducer, and amplifying the converted electrical signal to be converted into an analog or a digital electrical signal. The diaphragm disposed inside the transducer is formed with a piezoelectric element, and is characterized by having a vent hole formed thereon.
机译:提供了一种具有压电振动膜的MEMS麦克风。具有压电振动膜的MEMS麦克风包括结合到基板以形成内部空间的盖。换能器,其结合到布置在内部空间中的基板的上部,并且将通过声音通过孔进入的外部声音转换成电信号;半导体芯片,其结合到基板的上部,电连接到换能器,并放大转换后的电信号以转换成模拟或数字电信号。布置在换能器内部的膜片形成有压电元件,并且其特征在于在其上形成有通风孔。

著录项

  • 公开/公告号KR101496192B1

    专利类型

  • 公开/公告日2015-02-27

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20130039786

  • 发明设计人 이제형;배재영;정수연;

    申请日2013-04-11

  • 分类号H04R19/04;H01L29/84;

  • 国家 KR

  • 入库时间 2022-08-21 14:58:35

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