METHOD OF SYNTHESIS METAL SULFIDE USING ATOMIC LAYER DEPOSITION METAL OXIDE

摘要

The present invention relates to a metal sulfide synthesis method comprising a step of depositing a metal oxide (MO_x) on a substrate by using an atomic layer deposition method and a step of synthesizing a metal sulfide (MS_y) by sulfurizing the deposited metal oxide. The purpose of the present invention is to provide the method which synthesizes the metal sulfide in which thickness can be controlled by using the atomic layer deposition method.