MICROWAVE INTRODUCTION MECHANISM, MICROWAVE PLASMA SOURCE AND MICROWAVE PLASMA TREATMENT DEVICE

摘要

microwave introduction mechanism (41) is a planar antenna for radiating microwaves into the chamber (81 ) and the antenna unit 80 having , a tuner 60 for impedance matching , comprising a heat-radiating mechanism (90) for radiating the heat of the antenna unit 80, a tuner 60 forming the outer tubular conductor 52 and the inner body 51 which has a part of a microwave transmission conductor 53, outer conductor 52 and an inner conductor (53) movably disposed between the slag (61a, 61b) and slag slag has a drive 70 for moving the heat dissipation apparatus 90 includes a heat input end is located in the antenna unit 80, the heat to transfer heat of the antenna unit 80 to the heat radiation from the heat input stage and the stage pipe 91 and has a heat radiating unit 92 provided in the heat stage . ;