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METHOD FOR SYNTHESIZING GRAPHENE USING COPPER VAPOR AND DEVICE COMPRISING GRAPHENE SYNTHESIZED THEREBY

机译:用铜蒸气合成石墨烯的方法及包含其的合成石墨烯的装置

摘要

A method of graphene synthesis using copper vapor is provided. Specifically, a substrate is prepared, a copper foil is placed on the substrate so as to be spaced apart from the substrate, copper (Cu) vapor is formed from the copper foil, There is provided a graphene synthesis method using copper vapor in which the graphene precursor gas is contacted with the copper precursor gas to accelerate the graphene synthesis reaction by the copper (Cu) vapor and graphene is synthesized on the substrate. By not having a separate transfer process, it is possible to synthesize high-quality single-layer graphene (SLG) with minimized damage and contamination of the graphene, have. In addition, the present invention can be applied to various dielectric substrates, and the range of application of the manufactured devices can be expanded.
机译:提供了一种使用铜蒸气合成石墨烯的方法。具体地,制备基板,将铜箔放置在基板上以与基板间隔开,从铜箔形成铜(Cu)蒸气,提供一种使用铜蒸气的石墨烯合成方法,其中石墨烯前驱物气体与铜前驱物气体接触,以通过铜(Cu)蒸气加速石墨烯合成反应,并且在基板上合成了石墨烯。通过没有单独的转移过程,可以合成具有最小损坏和石墨烯污染的高质量单层石墨烯(SLG)。另外,本发明可以应用于各种介电基板,并且可以扩大所制造的器件的应用范围。

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