HYDROGEN DETECTING SENSOR CAPABLE OF DETECTING WIDE CONCENTRATION RANGE HYDROGEN GAS

摘要

Disclosed is a hydrogen detecting sensor comprising: a first electrode layer disposed on a surface of a substrate; a second electrode layer disposed on an upper portion of the first electrode layer, consisting of a metal catalyst capable of dissociating hydrogen atoms from hydrogen molecules; an insulating layer disposed between the first electrode layer and the second electrode layer, having an insulating material capable of reducing by reacting with the hydrogen atoms; and a device to measure capacitance which measures a change in capacitance of the insulating layer.