BASE-GENERATING AGENT PHOTOSENSITIVE RESIN COMPOSITION PATTERN-FORMING MATERIAL COMPRISING THE PHOTOSENSITIVE RESIN COMPOSITION PATTERN FORMATION METHOD USING THE PHOTOSENSITIVE RESIN COMPOSITION AND ARTICLE

摘要

the present invention is to Formula 1 as an indication that the electromagnetic irradiation and by heating the base It relates to a generator for generating a base. The present invention sensitivity is excellent, and regardless of the base generating agent available for the type of polymer precursors, a photosensitive resin composition containing a base generator of the present invention, the exposure portion and a large-soluble contrast in the unexposed portion is obtained, the shape It can be obtained a good pattern. and R & 1 &