real time monitoring trouble diagnosis apparatus of direct connected type equipment and thereof trouble diagnosis method

摘要

the present invention is a real-time monitoring equipment, directly type the start and fault diagnosis system. Diagnostic method in such a trouble diagnosis device, receiving each providing sensed signals from at least two sensors for sensing a component operating state of failure the facility to generate a digital sensing data, the digital sensing data of the relevant equipment Comparison each real-time monitoring period and the data obtained from the components that work together on a recipe, wherein said comparison generating a fault diagnosis data contained failed part information from the results of analysis, and displays the failure diagnostic data or to the outside comprises the step of transmitting. ;