MANUFACTURING METHOD OF WAVE-TUNABLE STIMULUS TIP AND STIMULUS TIP THEREBY

摘要

The present invention relates to a method for manufacturing a probe integrated with light-emitting diodes and, more specifically, to a method for manufacturing a probe capable of controlling a wavelength and a probe manufactured thereby, which comprises: a first step of preparing a substrate; a second step of forming an alignment key for forming a light-emitting diode on some areas of the substrate to form a first electrode layer; a third step of forming multiple light-emitting diodes having different emission wavelengths on the substrate based on the alignment key; a fourth step of forming a metal interconnect electrode on the substrate, which is electrically connected to the light-emitting diode; a fifth step of forming an insulating film to cover the light-emitting diode, the whole area on the substrate, and the metal interconnect electrode; a sixth step of forming a pattern on the substrate to form a probe; a seventh step of polishing or etching the substrate to reduce the thickness of the substrate; and an eighth step of separating a probe-shaped pattern from the substrate. Accordingly, multiple light-emitting diodes having different emission wavelengths are formed on a single probe (substrate) to allow a single probe to emit lights of various wavelength bands and selectively control either activation or suppressing of nerves, thereby providing very high clinical utility, reducing a unit product cost, and simplifying the process to improve the yield.