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DEVICE FOR AUTOMATIC REGENERATION OF A LITHIUM TARGET AND METHOD FOR AUTOMATIC REGENERATION OF A LITHIUM TARGET

机译:锂靶的自动再生装置和锂靶的自动再生方法

摘要

1. Device for automatic regeneration of a lithium target, which provides automatic regeneration of lithium lithium target, the device for automatic regeneration of lithium target contains a unit for deposition of lithium from the vapor phase for deposition of lithium from the vapor phase on the lithium target, and the unit for deposition of lithium from the vapor phase provides lithium deposition from the vapor phase on the lithium target by moving to the side of the lithium target. 2. The lithium target automatic regeneration device according to claim 1, further comprising a lithium film thickness measuring unit for measuring a lithium film thickness. 3. A device for automatic regeneration of a lithium target according to claim 2, wherein the device for automatic regeneration of a lithium target switches the positions of the lithium deposition unit from the vapor phase and the unit for measuring the thickness of the lithium film. A device for automatic regeneration of a lithium target according to claim 2, further comprising a channel for irradiation, wherein the device for automatic regeneration of a lithium target provides switching of the positions of the lithium vapor deposition unit, the unit for measuring the thickness of the lithium film and the channel for irradiation. A device for automatic regeneration of a lithium target according to any one of paragraphs. 1-4, further comprising a lithium removal unit for removing lithium. 6. A device for automatic regeneration of a lithium target according to claim 5, wherein the lithium removal unit is located adjacent to the device for automatic regeneration of a lithium target. A device for automatic regeneration of a lithium target according to claim 5 or 6, wherein each of the lithium vapor deposition unit, the measurement unit t
机译:1.用于锂靶的自动再生的装置,其提供锂锂靶的自动再生,用于锂靶的自动再生的装置包含用于从气相沉积锂的单元,用于从锂上气相沉积锂的单元。从气相沉积锂的单元,通过移动到锂靶的侧面,从气相在锂靶上沉积锂。 2.根据权利要求1所述的锂靶自动再生装置,其特征在于,还具有用于测定锂膜厚的锂膜厚测定部。 3.根据权利要求2所述的锂靶的自动再生装置,其特征在于,所述锂靶的自动再生装置将所述蒸镀单元的位置从气相和所述锂膜的厚度测量单元切换。 3.根据权利要求2所述的锂靶的自动再生装置,其特征在于,还具备照射通道,其中,所述锂靶的自动再生装置进行所述锂蒸镀单元的厚度测量单元的位置切换。锂膜和照射通道。根据段落中任一项的用于锂靶的自动再生的装置。参照图1-4,还包括用于除去锂的锂除去单元。 6.根据权利要求5所述的用于锂靶的自动再生的装置,其中,所述锂去除单元位于与用于锂靶的自动再生的装置相邻的位置。 7.根据权利要求5或6所述的锂靶的自动再生装置,其特征在于,所述锂蒸镀部,所述测定部t

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