METHOD OF COMPARATIVE TEST FOR RELIABILITY OF BATCHES OF INTEGRATED CIRCUITS

摘要

FIELD: testing technology.;SUBSTANCE: invention relates to microelectronics, namely to methods of ensuring quality and reliability of semiconductor integrated circuits (ICs). Essence: the equal number of products (at least 10 per a batch) is randomly selected from IC batches and the value of the informative parameter is measured. Then for each IC of all samples, five ESR of one and five ESR of other polarity with potential maximum allowed by specifications is supplied. The following IC terminals should be exposed to effect of ESR: power - a common point, input - power, output - power, input - output. Then the value of the informative parameter is measured. Then all ICs are stored under normal conditions for 72 hours. The value of the informative parameter is measured. Thermal annealing of all ICs is carried out at a temperature T=100°C. The value of the informative parameter is measured. Then the values of Δ₁, Δ₂, Δ₃ for each IC are determined. From the values of Δ₁, Δ₂, Δ₃ the relative reliability of the IC bathes is determined.;EFFECT: ensuring quality and reliability of semiconductor integrated circuits.;2 tbl