High rotation rate sensor is placed offset quadrature -

摘要

It is a rotational rate sensor with a substrate and a seismic mass is arranged on the substrate, whereby the angular rate sensor for detection of a rotation rate about an axis of rotation is configured, wherein the seismic mass a first mass element and a with the first mass element which is coupled to the second mass element, wherein the first mass element along a direction perpendicular to the axis of rotation to a drive movement is driven, wherein the first mass element and the second mass element along a both to the direction of drive as well as to the axis of rotation substantially vertical direction of detection can be deflected, wherein the rotation rate sensor is at least one compensating means, wherein the at least one compensating means for generating a compensation force acting on the second mass element is configured, wherein the compensating force in a substantially parallel to the detection direction of the compensation of the direction, and– the at least one compensating means is the only compensation means, wherein said at least one compensating means exclusively for the preparation of the in order to compensate for the direction oriented compensating force is configured,– the rotation rate sensor is configured in such a way that a mass element acting on the second quadrature offset force exclusively in a preferred direction parallel to compensate for the direction in the opposite direction is directed.