Process chamber for a chemical reaction coating process and method for coating of an optical object by means of a chemical reaction coating process

摘要

The invention relates to a process chamber (10) for a chemical reaction coating process for the coating of at least one optical object (22 to be coated.). The process chamber (10) in this case includes a chamber wall (18), which is a process chamber (16) includes at least in part, at least one through-opening (26; 34), at least one precursor (28a, 28b) and / or a flushing gas (29) through the passageway (26; 34) to carry out. Furthermore, the process chamber (10) at least a first process chamber element (12; 14), which has a first part of the vessel wall (18) provides the first process chamber element (12; 14) is designed in such a way that the at least one optical object to be coated (22) in such a manner at the at least one first process chamber element (12; 14) can be arranged that the at least one optical object (22) itself a second part of the vessel wall (18) forms.