Device for elemental analysis of microscopes.

摘要

Device for the qualitative and quantitative elemental analysis of small material regions of a sample by means of x-ray fluorescence to microscopes, characterized in that a sample location in the sample by means of a device for the representation of a microstructure and of this sample location is selectable by means of x-ray fluorescence the chemical composition can be determined, and wherein for the excitation of the sample / of the material envelope primary x-ray radiation with the aid of a pyro-electric effect can be generated.