CALIBRATION METHOD OF A CD-SEM CHARACTERIZATION TECHNIQUE

摘要

The present invention relates to a method for calibrating a CD-SEM technique, said method comprising the following steps: determining a correspondence function transforming at least one parameter obtained by modeling a measurement provided by the CD-SEM technique in a function of at least one parameter representative of a measurement provided by a reference characterization technique different from the CD-SEM technique, said correspondence function being characterized by a plurality of coefficients; performing measurements on a plurality of patterns chosen to cover the desired range of validity for the calibration, said measurements being made using both the CD-SEM technique to be calibrated and the reference technique; determining, from said measurements, a set of coefficients of the correspondence function minimizing the distance between the functions of the parameters measured by the reference technique and the application of the mapping function to the parameters obtained by modeling the measurements provided. by the CD-SEM technique; use of said set of coefficients during the implementation of the calibrated CD-SEM technique.