METHOD FOR TRACKING THE DEGASSING RATE BY MEASURING PARTIAL PRESSURES MEASURED BY MASS SPECTROMETRY

摘要

The invention relates to a method for monitoring the degassing of a component placed in a vacuum chamber, comprising the steps of: measuring partial pressures Pi of a set M of reference atomic masses, by means of a mass spectrometer connected to the vacuum chamber, - determining a degassing rate η, at least as a function of the measured partial pressures Pi, - calculating an evolution slope of the degassing rate. The degassing rate η can advantageously be determined by calculation by means of a relationship of the type: where M denotes the set of reference atomic masses, Pi denotes the partial pressures of the atomic masses measured by the mass spectrometer, the αi coefficients denote predetermined weighting coefficients associated with each partial pressure Pi, and N denotes a maximum atomic mass whose partial pressure Pi can be measured by the mass spectrometer.