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Diffraction grating for X-ray Talbot interferometer, method of manufacturing the same, and X-ray Talbot interferometer

机译:X射线Talbot干涉仪的衍射光栅,其制造方法以及X射线Talbot干涉仪

摘要

Provided are a diffraction grating for an X-ray Talbot interferometer, a method of manufacturing the same, and an X-ray Talbot interferometer, the method enabling easy and highly accurate manufacturing of a diffraction grating having grooves with a high aspect ratio. The diffraction grating for an X-ray Talbot interferometer includes a plurality of ridge-like X-ray absorbing portions (20b) formed on a substrate (22) along one direction at predetermined intervals through cutting of a metal film.
机译:提供了一种用于X射线Talbot干涉仪的衍射光栅,其制造方法以及X射线Talbot干涉仪,该方法使得能够容易且高精度地制造具有具有高纵横比的凹槽的衍射光栅。用于X射线Talbot干涉仪的衍射光栅包括通过切割金属膜以预定间隔沿一个方向在基板(22)上形成的多个脊状X射线吸收部分(20b)。

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