Method of forming organic polymer thin film and an apparatus for forming the organic polymer thin film

摘要

A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate 12 repeatedly, in which a plurality of kinds of monomers evaporated in a plurality of evaporation source containers 32a, 32b in vacuum state are introduced into a deposition chamber 10 in a vacuum state and polymerized on a surface of the substrate 12 arranged in the deposition chamber 10, each of the monomers in a liquid form is present in the evaporation source containers 32a, 32b in a constant amount every time, at the beginning of the evaporation operation of monomers.