ARRAYS OF MICROCAVITY PLASMA DEVICES WITH DIELECTRIC ENCAPSULATED ELECTRODES

摘要

Microcavity plasma devices and arrays with thin foil electrodes (16, 18) protected by metal oxide dielectric (15, 19) is disclosed. In a device, a pattern of microcavities (12) is produced in a metal foil. A thin glass layer (25) or vacuum packaging (34) is able to seal the discharge medium into the array.