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Calibration of a MEMS gyroscope so as to reduce thermal bias
Calibration of a MEMS gyroscope so as to reduce thermal bias
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机译:校准MEMS陀螺仪以减少热偏差
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摘要
A method for calibrating a micro-electro-mechanical system (MEMS) vibrating structure gyroscope is provided. The method includes obtaining an indication of a position of at least one proof mass with respect to at least one drive electrode and applying an electrostatic force to the at least one proof mass as a function of the indication, the electrostatic force configured to position the at least one proof mass in a first position with respect to at least one drive electrode.
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