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A SYSTEM FOR MEASURING AN OPTICAL SPECTRAL RESPONSE AND/OR IV DATA OF A PHOTOELECTRIC DEVICE UNDER TEST

机译:测试中用于测量光电装置的光学光谱响应和/或IV数据的系统

摘要

A system for measuring an optical spectral response or property and/or IV data of a device or object under test (9), comprising in optically coupled sequence: a broadband light source (1) for emitting light of a prede- fined spectrum, a slit and/or light guide (2), a wavelength dispersive device (3), a spatial light modulator (5) for re- ceiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator (5), focusing optics (6, 7, 8, 12, 13, 14) for the reflected light directed towards a reference detector (15) and towards the device or object under test (9), wherein the spatial light modulator (5) is embodied as a beamsplitter and is combined with a fil- ter (4) for suppression of second and higher order frequen- cies of the primary frequencies in the reflected light.
机译:一种用于测量被测设备或物体的光谱响应或特性和/或IV数据的系统(9),以光耦合顺序包括:用于发射预定光谱的光的宽带光源(1),狭缝和/或光导(2),波长色散装置(3),空间光调制器(5),用于接收发射的光并控制由所述调制器(5)反射的光的强度和光谱,聚焦光学器件(6、7、8、12、13、14)用于反射光,该反射光被导向参考检测器(15)和被测设备或被测物体(9),其中空间光调制器(5)被实现为分束器并与滤波器(4)结合使用,以抑制反射光中主频率的二阶和更高阶频率。

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