METHOD FOR LASER-STRUCTURING THIN LAYERS ON A SUBSTRATE IN ORDER TO PRODUCE MONOLITHICALLY CONNECTED THIN-LAYER SOLAR CELLS, AND METHOD FOR PRODUCING A THIN-LAYER SOLAR MODULE

摘要

The invention relates to a method for laser-structuring thin layers on a substrate in order to produce monolithically connected thin-layer solar cells, having the following steps:providing a laser with a laser wavelength,providing a substrate (1) which comprises a first side and a second side and which is transparent for the laser wavelength, said first side of the substrate has big a metal rear electrode thin layer (2), on which an absorber thin layer (3) for thin layer solar cells is arranged,emitting a laser beam (L) onto the substrate, andmoving the laser beam (L) over the substrate (1) along a writing line and/or moving the substrate (1) relative to the laser beam (L) along a writing line. According to the invention, the laser beam (L) is emitted onto the second side of the substrate (1) and is incident on the metal rear electrode thin layer (2) through the substrate (1), and laser pulses of the laser beam are adjusted in the nano-, pico-, or femtosecond range and the laser beam is moved such that the absorber thin layer (3) arranged over the metal rear electrode thin layer (2) is detached along the writing line, Hid a laser-influenced metal rear electrode thin layer (2) remains on the substrate.